Design and simulation for a MEMS vibratory tuning fork gyroscope with a connecting diamond-shaped frame


Vu Van The
Le Quy Don Technical University, Hanoi, Vietnam
Email: [email protected]
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This paper introduces design and simulation for a novel MEMS vibratory tuning fork gyroscope with a connecting diamond-shaped frame. This structure is designed and analyzed using ANSYS software to obtain the dynamic parameters of the proposed TFG. The resonant frequency in sensing and driving direction is 11582 Hz and 11605 Hz with 23 Hz mismatch frequency. The equivalent stiffness of the connecting frame in y¬-direction is determined to be 2360 N/m and the stiffness of the flexible beams in driving and sensing is 858 and 725 N/m, respectively. The results will be used to set up in an analytical problem to study the dynamic response of the proposed TFG in the future researches.

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Đánh giá:
Design and simulation for a MEMS vibratory tuning fork gyroscope with a connecting diamond-shaped frame Report description: This paper introduces design and simulation for a novel MEMS vibratory tuning fork gyroscope with a connecting diamond-shaped frame. This structure is designed and analyzed using ANSYS software to obtain the dynamic parameters of the proposed TFG. The resonant frequency in sensing and driving direction is 11582 Hz and 11605 Hz with 23 Hz mismatch frequency. The equivalent stiffness of the connecting frame in y¬-direction is determined to be 2360 N/m and the stiffness of the flexible beams in driving and sensing is 858 and 725 N/m, respectively. The results will be used to set up in an analytical problem to study the dynamic response of the proposed TFG in the future researches.


Design and simulation for a MEMS vibratory tuning fork gyroscope with a connecting diamond-shaped frame


This paper introduces design and simulation for a novel MEMS vibratory tuning fork gyroscope with a connecting diamond-shaped frame. This structure is designed and analyzed using ANSYS software to obtain the dynamic parameters of the proposed TFG. The resonant frequency in sensing and driving direction is 11582 Hz and 11605 Hz with 23 Hz mismatch frequency. The equivalent stiffness of the connecting frame in y¬-direction is determined to be 2360 N/m and the stiffness of the flexible beams in driving and sensing is 858 and 725 N/m, respectively. The results will be used to set up in an analytical problem to study the dynamic response of the proposed TFG in the future researches.
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